Single-crystalline-like indium tin oxide thin films prepared by plasma enhanced atomic layer deposition

CH Hsu, ZX Zhang, CY Shi, PH Huang… - Journal of Materials …, 2022 - pubs.rsc.org
In this study, indium tin oxide (ITO) thin films are prepared by plasma enhanced atomic layer
deposition (PEALD) using alternating exposures to cyclopentadienyl indium and oxygen …

Preparation of high-performance metal-free UV/near infrared-shielding films for human skin protection

CH Liang, YJ Chen - Nanomaterials, 2021 - mdpi.com
A series of metal-free UV/near infrared (NIR)-shielding coatings are successfully fabricated
by shielded cathodic arc plasma evaporation (CAPE) and substrate-biased RF magnetron …

Preparation of amorphous Ga–Sn–Zn–O semiconductor thin films by RF-sputtering method

CH Liang, JLH Chau, CC Yang, HH Shih - Materials Science and …, 2014 - Elsevier
Abstract Ga–Sn–Zn–O (GTZO) thin films were deposited on glass substrates via the radio-
frequency (RF) magnetron sputtering method at room temperature. The target for the GTZO …

Stability of the electro-optical properties and structural characteristics of H and Al co-doped ZnO films after heat treatment in H/Ar plasma

CH Liang, WS Hwang - Ceramics International, 2014 - Elsevier
ZnO co-doped with Al and H (HAZO) films were exposed to H/Ar plasma for various
durations (0–60 min) at 400° C to study the effects of heat treatment in H/Ar plasma on the …

Effects of growth temperature and target material on the growth behavior and electro-optical properties of ZnO: Al films deposited by high-rate steered cathodic arc …

CH Liang, WS Hwang, WL Wang - Applied Surface Science, 2015 - Elsevier
ZnO: Al (AZO) films were deposited using high-rate (215 nm/min) steered cathodic arc
plasma evaporation with a ceramic AZO target at various deposition temperatures (T d= 80 …

Fabrication of oxide-based near infrared-shielding coatings for a smart window to prevent infrared-induced photoaging in human skin

CH Liang, YJ Chen - Ceramics International, 2021 - Elsevier
Oxide-based near infrared (IR)-shielding coatings consisting of quarter‐wave stacks of
oxygen-deficient tantalum oxide (Ta 2 O 5− x) and silicon oxide (SiO 2) multilayers and tin …

Comparative study of structural and electro-optical properties of ZnO: Ga films grown by steered cathodic arc plasma evaporation and sputtering on plastic and their …

CH Liang, YJ Hsiao, WS Hwang - Thin Solid Films, 2016 - Elsevier
Ga-doped ZnO (GZO) films with various thicknesses (105–490 nm) were deposited on PET
substrates at a low temperature of 90° C by a steered cathodic arc plasma evaporation …

[图书][B] Influence of Platinum Nanoparticles on Ionic Transport and Hydrogen Reactivity of Yttria-Stabilized Zirconia Thin Films

F Mahyob - 2023 - search.proquest.com
Yttria-stabilized zirconia (YSZ) is a widely used ceramic material in solid oxide fuel cells,
oxygen sensors, and sensing applications due to its high ionic conductivity, chemical …

Properties of Blade-coated Transparent Conducting Oxide Sol-gel Precursor Films on Plastic Substrates

GG Turner - 2023 - utd-ir.tdl.org
The transparent conducting electrode (TCE) industry is dominated by indium-tin oxide (ITO)
films deposited on glass for rigid applications and flexible polymers such as polyethylene …

Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique

U Majeed - 2016 - eprints.uthm.edu.my
Silicon nitride based planar waveguides play an important role in biosensing applications.
Conventional fabrication of silicon nitride waveguides utilizes the chemical vapor deposition …