Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature

E Terzini, P Thilakan, C Minarini - Materials Science and Engineering: B, 2000 - Elsevier
Indium tin oxide films have been deposited by RF magnetron sputtering technique.
Discharge power density has been varied from 0.36 to 2 W cm− 2 and pure argon or …

Processing effects on the stability of amorphous indium gallium zinc oxide thin-film transistors

HQ Chiang, BR McFarlane, D Hong, RE Presley… - Journal of Non …, 2008 - Elsevier
Amorphous oxide semiconductors are attracting much attention due to their high electron
mobility even when processed at low temperatures. One such material is indium gallium zinc …

Anatase–rutile transformation through high-temperature annealing of titania films produced by ultrasonic spray pyrolysis

A Nakaruk, D Ragazzon, CC Sorrell - Thin Solid Films, 2010 - Elsevier
Titanium dioxide films were prepared by ultrasonic spray pyrolysis on (0001) α-quartz
substrates at 400° C and/or annealed in air at 600°, 800°, or 1000° C. The as-deposited …

Role of annealing temperature on microstructural and electro-optical properties of ITO films produced by sputtering

M Gulen, G Yildirim, S Bal, A Varilci, I Belenli… - Journal of Materials …, 2013 - Springer
This study probes the effect of annealing temperature on electrical, optical and
microstructural properties of indium tin oxide (ITO) films deposited onto soda lime glass …

ITO Top‐Electrodes via Industrial‐Scale PLD for Efficient Buffer‐Layer‐Free Semitransparent Perovskite Solar Cells

KPS Zanoni, A Paliwal… - Advanced Materials …, 2022 - Wiley Online Library
The deposition of transparent conductive oxides (TCO) usually employs harsh conditions
that are frequently harmful to soft/organic underlayers. Herein, successful use of an …

Semitransparent perovskite solar cells with ultrathin protective buffer layers

E Magliano, P Mariani, A Agresti… - ACS Applied Energy …, 2023 - ACS Publications
Semitransparent perovskite solar cells (ST-PSCs) are increasingly important in a range of
applications, including top cells in tandem devices and see-through photovoltaics …

Influence of O2 admixture and sputtering pressure on the properties of ITO thin films deposited on PET substrate using RF reactive magnetron sputtering

YS Kim, YC Park, SG Ansari, JY Lee, BS Lee… - Surface and Coatings …, 2003 - Elsevier
A systematic study of the growth of indium tin oxide (ITO) thin films on polyethylene
terephthalate substrate was carried out using RF reactive magnetron sputtering. The effect of …

Study on the ITO work function and hole injection barrier at the interface of ITO/a-Si: H (p) in amorphous/crystalline silicon heterojunction solar cells

WK Oh, SQ Hussain, YJ Lee, Y Lee, S Ahn… - Materials Research Bulletin, 2012 - Elsevier
For this study we focused on the front contact barrier height of HIT (ITO/a-Si: H (p)/a-Si: H
(i)/c-Si (n)) solar cell. The ITO films with low resistivity of 1.425× 10− 4Ωcm were deposited …

rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications

VA Dao, H Choi, J Heo, H Park, K Yoon, Y Lee… - Current Applied …, 2010 - Elsevier
Indium tin oxide (ITO) films of low resistivity, high transmittance and good figure of merit were
prepared by radio frequency magnetron sputtering, at different substrate temperatures (Ts) …

Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature

JH Shin, SH Shin, JI Park, HH Kim - Journal of Applied Physics, 2001 - pubs.aip.org
Indium tin oxide (ITO) thin films were deposited on polymeric substrates at room temperature
by dc reactive magnetron sputtering from an In–Sn (90–10 wt%) alloy target. The electrical …