Study on the influence of manufacturing tolerance of the spring beam on the sensitivity of the two-axis MEMS accelerometer
N Van Cuong, P Van Minh, BM Cuong… - International Journal on …, 2024 - Springer
Microelectromechanical systems (MEMS)—based sensor technologies play a crucial role in
determining the future of smart sensing applications because of their small size, low energy …
determining the future of smart sensing applications because of their small size, low energy …
High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer
Z Mohammed, IM Elfadel… - 2018 Symposium on …, 2018 - ieeexplore.ieee.org
We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range.
The high sensitivity is achieved by implementing a varying capacitive gap method, and by …
The high sensitivity is achieved by implementing a varying capacitive gap method, and by …
[HTML][HTML] Boosting the Electrostatic MEMS Converter Output Power by Applying Three Effective Performance-Enhancing Techniques
This current study aims to enhance the electrostatic MEMS converter performance mainly by
boosting its output power. Three different techniques are applied to accomplish such …
boosting its output power. Three different techniques are applied to accomplish such …
Performance Analysis of Micro-Electro-Mechanical Systems Based Capacitive Accelerometer
G Soni, N Bhatnagar, N Aggarwal - … Conference on Recent …, 2022 - ieeexplore.ieee.org
This article compares MEMS capacitive accelerometer springs. This study designs MEMS
single-axis accelerometers with alternative suspension systems. Structure analysis for 2 kHz …
single-axis accelerometers with alternative suspension systems. Structure analysis for 2 kHz …
Simulation and analysis of suspension based single axis mems capacitive accelerometer
This paper reports a comparison of different types of springs used in MEMS based
capacitive accelerometers. In this work MEMS based Single-axis accelerometers are …
capacitive accelerometers. In this work MEMS based Single-axis accelerometers are …
Design and Fabrication of a Three-Axis Capacitive Accelerometer
E Huang - Journal of the Microelectronic Engineering Conference, 2018 - repository.rit.edu
This paper focuses on the design and fabrication of a surface MEMS three-axis
accelerometer with comb-drive fingers that measures acceleration up to 10G in the x/y …
accelerometer with comb-drive fingers that measures acceleration up to 10G in the x/y …