extremely thin amorphous indium oxide transistors

A Charnas, Z Zhang, Z Lin, D Zheng… - Advanced …, 2024 - Wiley Online Library
Amorphous oxide semiconductor transistors have been a mature technology in display
panels for upward of a decade, and have recently been considered as promising back‐end …

Atomic layer deposition of oxide semiconductor thin films for transistor applications: a review

I Hwang, M Choe, D Jeon, IH Baek - Journal of Materials Chemistry C, 2024 - pubs.rsc.org
The accelerated evolution of artificial intelligence (AI) and semiconductor technologies has
fostered a mutually reinforcing relationship, whereby each technology has contributed to the …

Back-end-of-line-compatible scaled InGaZnO transistors by atomic layer deposition

J Zhang, Z Lin, Z Zhang, K Xu, H Dou… - … on Electron Devices, 2023 - ieeexplore.ieee.org
In this work, we report on back-end-of-line (BEOL)-compatible InGaZnO indium gallium zinc
oxide (IGZO) thin film transistors (TFTs) with extreme scaled device dimension including …

Transient Thermal and Electrical Co-Optimization of BEOL Top-Gated ALD In2O3 FETs Toward Monolithic 3-D Integration

PY Liao, D Zheng, S Alajlouni, Z Zhang… - … on Electron Devices, 2023 - ieeexplore.ieee.org
In this work, the transient thermal and electrical characteristics of top-gated (TG), ultrathin,
atomic-layer-deposited (ALD), back-end-of-line (BEOL) compatible indium oxide (In2O3) …

Improving the Thermal Stability of Indium Oxide n-Type Field-Effect Transistors by Enhancing Crystallinity through Ultrahigh-Temperature Rapid Thermal Annealing

CS Huang, CC Shih, WW Tsai, WY Woon… - … Applied Materials & …, 2025 - ACS Publications
Ultrathin indium oxide films show great potential as channel materials of complementary
metal oxide semiconductor back-end-of-line transistors due to their high carrier mobility …

Breaking the Trade‐Off Between Mobility and On–Off Ratio in Oxide Transistors

YC Chang, ST Wang, YT Lee, CS Huang… - Advanced …, 2024 - Wiley Online Library
Amorphous oxide semiconductors (AOS) are pivotal for next‐generation electronics due to
their high electron mobility and excellent optical properties. However, In2O3, a key material …

Spectroscopic Analysis of Electrical Phenomena and Oxygen Vacancy Generation for Self-Aligned Fully Solution-Processed Oxide Thin-Film Transistors

K Auewattanapun, JPS Bermundo… - … Applied Materials & …, 2024 - ACS Publications
This work unveils critical insights through spectroscopic analysis highlighting electrical
phenomena and oxygen vacancy generation in self-aligned fully solution-processed oxide …

Comparative Study of Indium Oxide Films for High‐Mobility TFTs: ALD, PLD and Solution Process

M Guo, J Wu, H Ou, D Xie, Q Zhu… - Advanced Electronic …, 2024 - Wiley Online Library
Deposition of indium oxide base films for high‐mobility thin film transistors (TFTs) has been
an important part in the implementation of high‐resolution and high‐frequency display back …

Metal oxide thin film electronics

TD Anthopoulos, JS Chen, A Facchetti - Applied Physics Letters, 2024 - pubs.aip.org
Metal oxides, once a scientific curiosity, 1 have evolved into a transformative technology for
modern electronics. 2 Their applications span energy, lighting, information displays …

Indium-zinc-tin-oxide thin-film-transistor reliability enhancement using fluoridation with CF4 reactive sputtering

CL Fan, TC Hsin, XW Yu, ZC Lin - Materials Science in Semiconductor …, 2024 - Elsevier
We propose a new fluorine doping scheme to achieve a notable improvement in IZTO thin-
film-transistor reliability using the fluorine-doped IZTO channel with the stacked IZTO: F/IZTO …