Atomic layer deposition of Al-doped ZnO nanomembrane with in situ monitoring

J Wang, Z Gu, Z Zhao, Y Mei, X Ke, Y Chen… - …, 2024 - iopscience.iop.org
Due to shortcomings such as poor homogeneity of Al doping, precisely controlling the
thickness, inability to conformally deposit on high aspect ratio devices and high pinhole rate …

Terahertz Time-Domain Characterization of Thin Conducting Films in Reflection Mode

DC Zografopoulos, I Dionisiev, N Minev… - … on Antennas and …, 2024 - ieeexplore.ieee.org
A protocol for the characterization of thin conducting films (TCSs) by means of terahertz time-
domain spectroscopy (THz-TDS) is thoroughly presented. By employing a Gires …

Implementation of atomic layer deposited AZO films in SLM structures

V Marinova, S Petrov, NHM Chau, D Petrova… - Applied Optics, 2024 - opg.optica.org
Here, we demonstrate the implementation of transparent conductive aluminum-doped zinc
oxide (AZO) thin films deposited on glass substrate (AZO/glass) by the atomic layer …

PUBLISHING GROUP

V Marinova, S Petrov, NHM CHAU, D PETROVA… - 2024 - opg.optica.org
Here, we demonstrate the implementation of transparent conductive Aluminumdoped Zinc
Oxide (AZO) thin films deposited on glass substrate (AZO/Glass) by Atomic Layer Deposition …