D Gurre, V Dasari, K Mulaga,
S Valasa… - … on Dielectrics and …, 2024 - ieeexplore.ieee.org
For the first time, we report on the spacer design guidelines for the Junctionless Forksheet
FET (JL-FSFET) at the sub-5nm technology node. Recently, this device has emerged as the …