MEMS micro-coils for magnetic neurostimulation

X Liu, AJ Whalen, SB Ryu, SW Lee, SI Fried… - Biosensors and …, 2023 - Elsevier
Micro-coil magnetic stimulation of brain tissue presents new challenges for MEMS micro-coil
probe fabrication. The main challenges are threefold;(i) low coil resistance for high power …

[HTML][HTML] Etch mechanism of an Al2O3 hard mask in the Bosch process

M Drost, S Marschmeyer, M Fraschke… - Micro and Nano …, 2022 - Elsevier
The etching of high aspect ratio structures in silicon via the Bosch process is essential in
modern technologies such as microelectromechanical systems (MEMS) and through‑silicon …

[HTML][HTML] New Approach toward Ultraviolet/O3-Assisted Nanoetching of Ingeo™ Surface

FS Fattahi, SA Mousavi Shoushtari - Nanochemistry Research, 2022 - nanochemres.org
Nano-etching of materials offers the possibility of driving significant surface properties such
as wettability and anti-reflectivity. Remarkably, plasma and laser processes can lead to …

Preparation of Ag nanosheet hierarchical clubbed micro/nanostructured arrays and their application based on the SERS effect

H Zhang, G Li, X Tian, L Chen, H Wang… - Journal of …, 2019 - Elsevier
Ag nanosheet hierarchical clubbed micro/nanostructured arrays (HCMNs) were prepared
through two-step electrodeposition method on an ITO conduction glass coated ZnO seed …

Spatially resolved ground state atomic oxygen density during the mode transition of inductively coupled oxygen plasmas

Q Zeng, H Jin, S Meng, W Liang, H Shu - Vacuum, 2019 - Elsevier
The ground state atomic oxygen density (n Og) and its distribution were systematically
studied by two-photon absorption laser induced fluorescence (TALIF) during the discharge …

[PDF][PDF] Etch mechanism of an Al₂O₃ hard mask in the Bosch process

M Drost, S Marschmeyer, M Fraschke… - Micro and Nano …, 2022 - opus4.kobv.de
The etching of high aspect ratio structures in silicon via the Bosch process is essential in
modern technologies such as microelectromechanical systems (MEMS) and through‑silicon …

MEMS Micro-coils for Magnetic Stimulation of Brain Tissue

X Liu - 2023 - orbit.dtu.dk
MEMS Micro-coils for Magnetic Stimulation of Brain Tissue Page 1 General rights Copyright
and moral rights for the publications made accessible in the public portal are retained by the …

[PDF][PDF] A New Approach toward Ultraviolet/O

FS Fattahi, SAM Shoushtari - academia.edu
Patterned surfaces are usually used for various applications like biomedical uses [1]. The
response of tissues to an implant mainly depends on the physico-chemical properties of its …

[PDF][PDF] Micro and Nano Engineering

M Drost, S Marschmeyer, M Fraschke, O Fursenko… - opus4.kobv.de
The etching of high aspect ratio structures in silicon via the Bosch process is essential in
modern technologies such as microelectromechanical systems (MEMS) and through-silicon …