M Drost, S Marschmeyer, M Fraschke… - Micro and Nano …, 2022 - Elsevier
The etching of high aspect ratio structures in silicon via the Bosch process is essential in modern technologies such as microelectromechanical systems (MEMS) and through‑silicon …
Nano-etching of materials offers the possibility of driving significant surface properties such as wettability and anti-reflectivity. Remarkably, plasma and laser processes can lead to …
H Zhang, G Li, X Tian, L Chen, H Wang… - Journal of …, 2019 - Elsevier
Ag nanosheet hierarchical clubbed micro/nanostructured arrays (HCMNs) were prepared through two-step electrodeposition method on an ITO conduction glass coated ZnO seed …
Q Zeng, H Jin, S Meng, W Liang, H Shu - Vacuum, 2019 - Elsevier
The ground state atomic oxygen density (n Og) and its distribution were systematically studied by two-photon absorption laser induced fluorescence (TALIF) during the discharge …
M Drost, S Marschmeyer, M Fraschke… - Micro and Nano …, 2022 - opus4.kobv.de
The etching of high aspect ratio structures in silicon via the Bosch process is essential in modern technologies such as microelectromechanical systems (MEMS) and through‑silicon …
MEMS Micro-coils for Magnetic Stimulation of Brain Tissue Page 1 General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the …
Patterned surfaces are usually used for various applications like biomedical uses [1]. The response of tissues to an implant mainly depends on the physico-chemical properties of its …
M Drost, S Marschmeyer, M Fraschke, O Fursenko… - opus4.kobv.de
The etching of high aspect ratio structures in silicon via the Bosch process is essential in modern technologies such as microelectromechanical systems (MEMS) and through-silicon …