Electron dynamics in low pressure capacitively coupled radio frequency discharges
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …
important current research topic that is relevant for many applications. Particularly, in the low …
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …
swarms and low-temperature plasma sources. The main advantage of such approaches is …
Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields
S Patil, S Sharma, S Sengupta, A Sen… - Physical Review …, 2022 - APS
We report the existence of an enhanced operating regime for a high-frequency, low-
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …
Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices
Achieving large-scale kinetic modeling is a crucial task for the development and optimization
of modern plasma devices. With the trend of decreasing pressure in applications, such as …
of modern plasma devices. With the trend of decreasing pressure in applications, such as …
[HTML][HTML] Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse …
S Sharma, S Patil, S Sengupta, A Sen, A Khrabrov… - Physics of …, 2022 - pubs.aip.org
Recently, Patil et al.[Phys. Rev. Res. 4, 013059 (2022)] have reported the existence of an
enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge …
enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge …
Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches
The etching of sub micrometer high-aspect-ratio (HAR) features into dielectric materials in
low pressure radio frequency technological plasmas is limited by the accumulation of …
low pressure radio frequency technological plasmas is limited by the accumulation of …
Best impedance matching seeking of single-frequency capacitively coupled plasmas by numerical simulations
Impedance matching can maximize the absorbed power transferred to the plasma load and
minimize the reflected power, making it critical and indispensable for capacitively coupled …
minimize the reflected power, making it critical and indispensable for capacitively coupled …
Kinetic simulation of a 50 mTorr capacitively coupled argon discharge over a range of frequencies and comparison to experiments
S Simha, S Sharma, A Khrabrov, I Kaganovich… - Physics of …, 2023 - pubs.aip.org
The effect of driving frequency in the range of 13.56–73 MHz on electron energy distribution
and electron heating modes in a 50 mTorr capacitively coupled argon plasma discharge is …
and electron heating modes in a 50 mTorr capacitively coupled argon plasma discharge is …
Electric field filamentation and higher harmonic generation in very high frequency capacitive discharges
The effects of the discharge voltage on the formation and nature of electric field transients in
a symmetric, collisionless, very high frequency, capacitively coupled plasma are studied …
a symmetric, collisionless, very high frequency, capacitively coupled plasma are studied …
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
A particle-in-cell simulation study is performed to investigate the discharge asymmetry,
higher harmonic generations and electron heating mechanism in a low pressure …
higher harmonic generations and electron heating mechanism in a low pressure …