The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …

Online or real-time defect detection of display panels after array process is of paramount
importance for quality control and yield rate improvement of products in display industry …

摘要在线测量检测技术与装备是保证集成电路(IC) 制造质量和良率的唯一有效技术手段, 在IC
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …

Quantitative optical measurements of deep subwavelength, three-dimensional (3D),
nanometric structures with sensitivity to sub-nanometer details address a ubiquitous …

In this paper, we present a novel interpretable machine learning technique that uses unique
physical insights about noisy optical images and a few training samples to classify …

With the ever-increasing demand for sub-10 nm integrated circuit chips in the fields such as
consumer electronics, interconnect hardware, and electronic medical equipment, the impact …

We present an efficient machine learning framework for detection and classification of
nanoparticles on surfaces that are detected in the far-field with coherent Fourier …

Optical far-field detection and imaging of deep-subwavelength objects in a large-area wafer
is challenging because of the well-known diffraction barrier and weak Rayleigh scattering …

Periodic nanostructures have important applications in nanophotonics and nanostructured
materials as they provide various properties that are advantageous compared to …

Using light as a probe to investigate perturbations with deep subwavelength dimensions in
large-scale wafers is challenging because of the diffraction limit and the weak Rayleigh …