High aspect ratio silicon etch: A review
B Wu, A Kumar, S Pamarthy - Journal of applied physics, 2010 - pubs.aip.org
High aspect ratio (HAR) silicon etch is reviewed, including commonly used terms, history,
main applications, different technological methods, critical challenges, and main theories of …
main applications, different technological methods, critical challenges, and main theories of …
Method of constructing a semiconductor device and structure
Z Or-Bach, DC Sekar, B Cronquist, I Beinglass… - US Patent …, 2012 - Google Patents
2011-12-06 Assigned to MONOLITHIC 3D INC. reassignment MONOLITHIC 3D INC.
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
Multilevel semiconductor device and structure with memory
Z Or-Bach, JW Han - US Patent 10,515,981, 2019 - Google Patents
US10515981B2 - Multilevel semiconductor device and structure with memory - Google
Patents US10515981B2 - Multilevel semiconductor device and structure with memory …
Patents US10515981B2 - Multilevel semiconductor device and structure with memory …
Method of forming three dimensional integrated circuit devices using layer transfer technique
Z Or-Bach, D Sekar, B Cronquist, Z Wurman - US Patent 8,642,416, 2014 - Google Patents
US8642416B2 - Method of forming three dimensional integrated circuit devices using layer
transfer technique - Google Patents US8642416B2 - Method of forming three dimensional …
transfer technique - Google Patents US8642416B2 - Method of forming three dimensional …
Semiconductor device and structure
Z Or-Bach, B Cronquist, I Beinglass, JL De Jong… - US Patent …, 2013 - Google Patents
US8362482B2 - Semiconductor device and structure - Google Patents US8362482B2 -
Semiconductor device and structure - Google Patents Semiconductor device and structure Info …
Semiconductor device and structure - Google Patents Semiconductor device and structure Info …
Ultra deep reactive ion etching of high aspect-ratio and thick silicon using a ramped-parameter process
Y Tang, A Sandoughsaz, KJ Owen… - Journal of …, 2018 - ieeexplore.ieee.org
This paper reports an advanced deep reactive ion etching (DRIE) process for realizing ultra-
deep (500-μm) and ultra-high aspect-ratio (UHAR) silicon structures (AR 40 for 1-mm …
deep (500-μm) and ultra-high aspect-ratio (UHAR) silicon structures (AR 40 for 1-mm …
Semiconductor device and structure
Z Or-Bach, B Cronquist, I Beinglass, JL De Jong… - US Patent …, 2013 - Google Patents
2011-03-25 Assigned to MONOLITHIC 3D INC. reassignment MONOLITHIC 3D INC.
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
Method for fabrication of a semiconductor device and structure
Z Or-Bach, DC Sekar, B Cronquist - US Patent 8,557,632, 2013 - Google Patents
US8557632B1 - Method for fabrication of a semiconductor device and structure - Google
Patents US8557632B1 - Method for fabrication of a semiconductor device and structure …
Patents US8557632B1 - Method for fabrication of a semiconductor device and structure …
Semiconductor device and structure
Z Or-Bach, B Cronquist, I Beinglass, JL De Jong… - US Patent …, 2013 - Google Patents
2010-12-03 Assigned to NuPGA Corporation reassignment NuPGA Corporation
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
Semiconductor system and device
Z Or-Bach, D Sekar, B Cronquist, Z Wurman - US Patent 9,219,005, 2015 - Google Patents
US9219005B2 - Semiconductor system and device - Google Patents US9219005B2 -
Semiconductor system and device - Google Patents Semiconductor system and device …
Semiconductor system and device - Google Patents Semiconductor system and device …