摘要对于步进扫描投影光刻机, 掩模台和工件台的同步伺服性能将直接影响整机技术指标.
掩模台和工件台是典型的六自由度超精密运动台, 在耦合动力学, 复杂内外部干扰条件下兼顾高 …

Magnetically levitated (maglev) planar motor is a promising precision motion system in
industry. In order to address the issue of coupling effect in maglev planar motor and achieve …

Iterative learning control (ILC) enables substantial performance improvement by using past
operational data in combination with approximate plant models. The aim of this article is to …

Iterative learning control (ILC) applies to systems that repeat the same finite duration task
repeatedly. Each repetition is usually termed as a trial, and the associated duration is called …

This work investigates robust monotonic convergent iterative learning control (ILC) for
uncertain linear systems in both time and frequency domains, and the ILC algorithm …

Since it is increasingly necessary to control machines in industry, the goal of controlled
objects with repetitive operating characteristics is to ideally track the desired input to meet …