I Park,
Y Choi,
C Shin - physica status solidi (a), 2024 - Wiley Online Library
In this work, the effect of interlayer on the ferroelectric properties of Hf0. 5Zr0. 5O2 (HZO)‐
based metal–ferroelectric–metal (MFM) capacitor is investigated. In detail, a 1 nm thick …