Embedded DRAM in replacement metal gate technology

Y Liu, MH Chi - US Patent 9,640,538, 2017 - Google Patents
Methods for forming an eIDRAM with replacement metal gate technology and the resulting
device are disclosed. Embodiments include forming first and second dummy electrodes on a …

Structure and method for forming capacitors for a three-dimensional NAND

L Chen, C Gan, W Liu, C Shunfu - US Patent 11,437,464, 2022 - Google Patents
Embodiments of a three-dimensional capacitor for a memory device and fabrication methods
are disclosed. The method includes forming, on a first side of a first substrate, a peripheral …

Multi-gate semiconductor structure and method of manufacturing the same

HY Wei, P Pei-Hsiu, K Jen - US Patent 12,107,162, 2024 - Google Patents
H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating
or switching and having potential barriers; Capacitors or resistors having potential barriers …

Memory structure

YT Chu, CK Chiu, C Ho - US Patent 11,335,691, 2022 - Google Patents
A memory structure including a substrate, a memory cell, and a transistor is provided. The
substrate includes a memory cell region and a peripheral circuit region. The memory cell is …