P Devie, F Bell, G Le Saux - US Patent 6,909,498, 2005 - Google Patents
(57) ABSTRACT A method for measuring the geometrical Structure of an optical component (2) in transmission, comprises illuminat ing the optical component by means of a first …
DM Broadway - US Patent 9,601,391, 2017 - Google Patents
A method and system are provided for determining mechanical stress experienced by a film during fabrication thereof on a substrate positioned in a vacuum deposition chamber. The …
G02B27/4205—Diffraction optics, ie systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to …
T Dresel - US Patent 9,435,640, 2016 - Google Patents
Methods and systems for measuring asymmetric surface topology are described. In one aspect, a method includes directing a test beam including a spherical wave front along an …
DM Broadway - US Patent 10,580,706, 2020 - Google Patents
A system deposits a film on a substrate while determining mechanical stress experienced by the film. A substrate is provided in a deposition chamber. A support disposed in the chamber …
AM Scott, AC Lewin - US Patent 7,907,262, 2011 - Google Patents
Apparatus for indicating the departure of a shape of an object from a specified shape is described. The apparatus includes a light source for directing an incident beam of radiation …
H Iijima, A Maeda - US Patent 9,091,534, 2015 - Google Patents
In view of the above, the present invention provides a measuring apparatus and a measuring method to measure optical characteristics such as a Surface shape and a …
W Hall - US Patent App. 11/312,270, 2006 - Google Patents
The present invention seeks to provide a non destructive, non-contact method and apparatus for determin ing mold geometry. The present invention may also provide a non …
M Namiki - US Patent 7,286,212, 2007 - Google Patents
An apparatus for measuring the eccentricity of the aspherical surface has a light source unit; a condenser lens condensing light rays in the proximity of the center of paraxial curvature of …