Systems and methods for creating crystallographic-orientation controlled poly-silicon films

JS Im, PC van der Wilt - US Patent 7,645,337, 2010 - Google Patents
In accordance with one aspect, the present invention provides a method for providing
polycrystalline films having a con trolled microstructure as well as a crystallographic texture …

Systems and methods for processing thin films

J Im - US Patent 7,364,952, 2008 - Google Patents
The present disclosure is directed to methods and systems for processing a thin film
samples. In an exemplary method, semiconductor thin films are loaded onto two different …

Semiconductor device having pixel electrode and peripheral circuit

T Konuma, A Sugawara, Y Uehara, H Zhang… - US Patent …, 2009 - Google Patents
(57) ABSTRACT A TFT formed on an insulating Substrate source, drain and channel
regions, a gate insulating film formed on at least the channel region and a gate electrode …

Semiconductor device and method for manufacturing the same

T Konuma, A Sugawara, Y Uehara, H Zhang… - US Patent …, 2009 - Google Patents
(57) ABSTRACT A TFT formed on an insulating Substrate source, drain and channel
regions, a gate insulating film formed on at least the channel region and a gate electrode …

Semiconductor device and method for manufacturing the same

T Konuma, A Sugawara, Y Uehara, H Zhang… - US Patent …, 2008 - Google Patents
(57) ABSTRACT ATFT formed on an insulating Substrate source, drain and channel regions,
a gate insulating film formed on at least the channel region and a gate electrode formed on …

Line scan sequential lateral solidification of thin films

JS Im - US Patent 8,221,544, 2012 - Google Patents
(22) Filed: Dec. 2, 2005 A polycrystalline film is prepared by (a) providing a substrate having
a thin film disposed thereon, said film capable of (65) Prior Publication Data laser-induced …

Laser-irradiated thin films having variable thickness

J Im - US Patent 7,164,152, 2007 - Google Patents
(57) ABSTRACT A crystalline film includes a first crystalline region having a first film
thickness and a first crystalline grain structure; and a second crystalline region having a …

Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device

K Tanaka - US Patent 7,868,267, 2011 - Google Patents
An object of the present invention is to provide a method and a device for constantly setting
the energy distribution of a laser beam on an irradiating face, and uniformly irradiating the …

Systems and methods for inducing crystallization of thin films using multiple optical paths

J Im - US Patent 7,318,866, 2008 - Google Patents
The present invention is directed to systems and methods for irradiating regions of a thin film
sample (s) with laser beam pulses having different energy beam characteristics that are …

Systems and methods for preparing epitaxially textured polycrystalline films

JS Im - US Patent 8,012,861, 2011 - Google Patents
The disclosed Subject matter relates to systems and methods for preparing epitaxially
textured polycrystalline films. In one or more embodiments, the method for making a textured …