RS Chau, BS Doyle, J Kavalieros,
D Barlage… - US Patent …, 2008 - Google Patents
4,906,589 A 3, 1990 Chao 4,996,574 A 2f1991 Shirasaki et al. 5,124,777 A 6, 1992 Lee
5,338,959 A 8, 1994 Kim et al. 5,346,839 A 9, 1994 Sundaresan................. 438/164 …