In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

Mode-localized sensors have attracted attention because of their high parametric sensitivity
and first-order common-mode rejection to temperature drift. The high-fidelity detection of …

A design of tunable terahertz (THz) resonator by using asymmetrical F-shaped metamaterial
(AFSM) is presented, which is composed of Au layer fabricated on silicon-on-insulator (SOI) …

Mode interaction in M/NEMS arouses many interests in enhancing functionality in recent
years. In this paper, the dynamics of two mechanically coupled micro-resonators with …

Miniaturized physical transducers based on weakly coupled resonators have previously
demonstrated the twin benefits of high parametric sensitivity and the first-order common …

This paper introduces the comprehensive design concepts, procedure, and post-process
flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …

This Part I of two papers introduces a design flow for micromechanical RF channel-select
filters with tiny fractional bandwidths capable of eliminating strong adjacent channel …

We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on
electrothermally and electrostatically actuated microelectromechanical-system (MEMS) …

This work proposes a novel electrostatic mechanically coupled narrowband filter based on
width extensional mode (WEM) resonators. Rectangle plate WEM resonators have the …

MEMS bandpass filters based on electrostatically driven, mechanically coupled beams with
in-plane motion have been demonstrated up to the VHF band. Filters higher than second …