Recent advances in nanorobotic manipulation inside scanning electron microscopes

C Shi, DK Luu, Q Yang, J Liu, J Chen, C Ru… - Microsystems & …, 2016 - nature.com
A scanning electron microscope (SEM) provides real-time imaging with nanometer
resolution and a large scanning area, which enables the development and integration of …

4D printing: Enabling technology for microrobotics applications

G Adam, A Benouhiba, K Rabenorosoa… - Advanced Intelligent …, 2021 - Wiley Online Library
This review demonstrates that 4D printing constitutes a key technology to enable significant
advances in microrobotics. Unlike traditional microfabrication techniques, 4D printing …

Automated four-point probe measurement of nanowires inside a scanning electron microscope

C Ru, Y Zhang, Y Sun, Y Zhong, X Sun… - IEEE Transactions …, 2010 - ieeexplore.ieee.org
Nanomanipulation inside a scanning electron microscope (SEM) has been employed to
maneuver and characterize nanomaterials. Despite recent efforts toward automated …

Advances in the atomic force microscopy for critical dimension metrology

D Hussain, K Ahmad, J Song… - Measurement Science and …, 2016 - iopscience.iop.org
Downscaling, miniaturization and 3D staking of the micro/nano devices are burgeoning
phenomena in the semiconductor industry which have posed sophisticated challenges in …

Advancing High-Throughput Cellular Atomic Force Microscopy with Automation and Artificial Intelligence

O Thomas--Chemin, S Janel, Z Boumehdi, C Séverac… - ACS …, 2025 - ACS Publications
Atomic force microscopy (AFM) has reached a significant level of maturity in biology,
demonstrated by the diversity of modes for obtaining not only topographical images but also …

[图书][B] Micro-nanorobotic manipulation systems and their applications

T Fukuda, F Arai, M Nakajima - 2013 - books.google.com
Micro/Nano Robotics and Automation technologies have rapidly grown associated with the
growth of Micro and Nanotechnologies. This book presents a summary of fundamentals in …

Control of interaction force in constant-height contact mode atomic force microscopy

SB Lavanya, GR Jayanth - Mechatronics, 2022 - Elsevier
Contact mode is a versatile and widely used technique for imaging samples using the
Atomic Force Microscope (AFM). When contact mode imaging is performed in constant …

Analysis and specificities of adhesive forces between microscale and nanoscale

M Gauthier, S Alvo, J Dejeu… - IEEE Transactions …, 2013 - ieeexplore.ieee.org
Despite a large number of proofs of concept in nanotechnologies (eg, nanosensors),
nanoelectromechanical systems (NEMS) hardly come to the market. One of the bottlenecks …

[PDF][PDF] 纳米操作技术研究及应用进展

王根旺, 管延超, 王扬, 丁烨, 杨立军 - Chinese Journal of Lasers, 2021 - researching.cn
摘要纳米操作技术是实现纳米材料位移, 排布, 形变等操作的关键方法, 也是一种“自下而上”
制造性能优异的纳米结构及纳米电路的重要技术手段, 同时也为新型纳米器件的研发提供了新 …

Recent Advances in controlled manipulation of micro/nano particles: A review

M Shah, Y Wu, S Chen, JL Mead, L Hou… - Journal of Physics D …, 2024 - iopscience.iop.org
This review discusses the transformative impact of micro/nano particle manipulation
techniques across scientific and technological disciplines. Emphasizing the pivotal role of …