Wireless communication has led to an explosive growth of emerging consumer and military
applications of radio frequency (RF), microwave and millimeter wave circuits and systems …

Micro-electro-mechanical system (MEMS) technology has radically changed the scale,
performance, and cost of a wide variety of sensors and actuators by taking advantage of …

Microelectromechanical systems (MEMS) technology has the potential of replacing many of
the radio frequency (RF) components used in to day's satellite communication systems. In …

A new class of fully compliant bistable mechanisms with the added benefit of integrated self-
retraction has been developed (hereafter identified as Self-Retracting Fully compliant …

This is the first comprehensive book to address the design of RF MEMS-based circuits for
use in high performance wireless systems. A groundbreaking research and reference tool …

In vitro fertilization (IVF) and intracytoplasmic sperm injection (ICSI) are the most commonly
used assisted reproductive technologies to overcome male infertility problems. One of the …

A stability analysis and design method for MEMS resonators is presented. The frequency
characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on …

This paper discusses the design and fabrication of MEMS differential capacitive
accelerometer (z-axis sensitive) structure. The accelerometer structure consists of one each …

RF MEMS are small mechanical devices fabricated by photolithographic processes, which
are used for elemental signal processing functions in rf and microwave frequency circuits …

The reliability of electrostatically actuated ohmic contact type MEMS relays has been
investigated. Multi-contact MEMS relays laterally actuated using electrostatic comb-drive …