The paper describes and discusses the design and testing of an efficient and high-sensitivity
calorimetric thermal sensor developed for bi-directional wall shear stress measurements in …

A linear array of microscale thermal anemometers has been designed, fabricated and
characterized. The sensitive element consists of a self-compensated-stress multilayer (Ni/W) …

A microscale low power high temperature gradient calorimetric (HTGC) sensor measuring
both mean and fluctuating bidirectional wall shear stress is presented. The micromachined …

This paper presents and discusses the results obtained with a MEMS (Micro-Electro-
Mechanical System) high temperature gradient sensor for time-averaged and fluctuating …

We present an efficient and high-sensitive thermal micro-sensor for near wall flow
parameters measurements. By combining substrate-free wire structure and mechanical …

This paper reports the use of an array of calorimetric micro-sensors that perform bidirectional
measurement of wall shear stress, for flow separation detection and control. The sensors …

Fabrication of nanoscale and microscale machines and devices is one of the goals of
nanotechnology. For this purpose, different materials, methods, and devices should be …

We present an innovative and practical pressure sensor based on Pirani effect enabling
high sensitivity, high resolution, and high dynamic range around atmospheric pressure. The …

This paper presents a multifunctional hot-wire based microstructure enabling the design of
pressure sensors and wall shear stress sensors for aerodynamic applications. The hotwire is …

We report on micro-machined flow-rate sensors as part of autonomous multi-parameter
sensing devices for water network monitoring. Three different prototypes of the flow-rate …