Laser Ultrasound Investigations of AlScN (0001) and AlScN (11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates
EA Mayer, O Rogall, A Ding, A Nair, A Žukauskaitė… - Micromachines, 2022 - mdpi.com
The laser ultrasound (LU) technique has been used to determine dispersion curves for
surface acoustic waves (SAW) propagating in AlScN/Al2O3 systems. Polar and non-polar …
surface acoustic waves (SAW) propagating in AlScN/Al2O3 systems. Polar and non-polar …