Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

Laser interference lithography is an attractive method for the fabrication of a large-area two-
dimensional planar scale grating, which can be employed as a scale for multi-axis optical …

Periodic microscale array structures play an important role in diverse applications involving
photonic crystals and diffraction gratings. A polarized holographic lithography system is …

In dimensional metrology it is necessary to carry out multi-axis angle and displacement
measurement for high-precision positioning. Although the state-of-the-art linear …

A new method for measurement of the pitch deviation of a scale grating by an optical angle
sensor based on the laser autocollimation is proposed. In the proposed method, the scale …

An absolute surface encoder for measurement of absolute in-plane position with a mode-
locked femtosecond laser and a planar scale grating having variable periods along the two …

A two-axis Lloyd's mirrors interferometer based optical fabrication system was theoretically
investigated and constructed for patterning high-uniformity nanoscale crossed grating …

In this paper, we propose a reflective two-dimensional (2D) metal-dielectric grating based on
cylindrical hole nano arrays with excellent polarization-independent high diffraction …

A new, to the best of our knowledge, method of generating interference patterns based on a
non-orthogonal Lloyd's mirror interferometer with a spatial phase modulation is proposed. In …

Laser interference lithography is an effective approach for grating fabrication. As a key
parameter of the grating profile, the duty cycle determines the diffraction characteristics and …