In semiconductor manufacturing, machines are usually qualified to process a limited number
of recipes related to products. It is possible to qualify recipes on machines to better balance …

This paper is concerned with the qualification management problem of parallel machines
under high uncertainties in the semiconductor manufacturing industry. Product–machine …

We present and solve a joint production and qualification planning problem for a
manufacturing environment with high process flexibility. Various factors contribute to the …

In this thesis, capacity allocation is modeled for a semiconductor fabrication facility (wafer
fab), with measures and methods that optimize the capacity allocation of wafer fabs. The …

In some manufacturing contexts, such as semiconductor manufacturing, machines must be
qualified, or eligible, to process a product, and machines cannot be qualified for all products …

A qualification management software that proposes recipe qualifications on tools in toolsets
for semiconductor manufacturing has been developed. The qualification proposals are …

In semiconductor manufacturing facilities, workstations are defined as sets of non-identical
machines that are able to process different product types. Depending on production …

Qualification and batch size constraints are two important characteristics of many toolsets in
semiconductor manufacturing. In this paper, we consider the impact of batch size constraint …

This paper focuses on the configuration of a parallel multi-purpose machines workshop. An
admissible configuration must be chosen in order to ensure that a load-balanced production …

In order to use semiconductor manufacturing equipment more efficiently, a Decision Support
System (DSS) has been developed, which suggests on which tools processes should be …