The design principles of a mass-produced surface micromachined gyroscope are described.
The device is integrated on a single 3 mm/spl times/3 mm chip with a 3-/spl mu/m BiCMOS …

A microfabricated gyroscope to measure rotation about an axis perpendicular to the surface
of the substrate. The driving electrodes, X-axis sensing electrodes, and Y-axis sensing …

Multi-axis Sensors are highly desirable for inertial Sensing of motion in three dimensions.
Previously, Such Sensors were constructed of relatively large and expensive electro …

(52) US Cl.............................. 435/6; 435/7.1; 435/7.2:(57) ABSTRACT 435/7.3; 435/287.1;
435/288.1; 422/58: 422/68. 1; 422/119 Apparatus and methods for monitoring, analyzing …

BACKGROUND The present invention relates generally to micro fabricated sensors, and
more particularly to microfabricated gyroscopic sensors. Multi-axis sensors are highly …

The foregoing objects are realized by an integrated rate and acceleration sensor
(multisensor) that is con structed and operated in accordance with this inven tion. A …

A multistable tunable electromicromechanical resonator structure incorporates electrostatic
actuators which permit modification of the resonant frequency of the structure. The actuators …

A tunable electromicromechanical resonator structure incorporates an electrostatic actuator
which permits reduction or enhancement of the resonant frequency of the structure. The …

BACKGROUND This invention relates to micro-electromechanical SyS tems (MEMS), and
more particularly to the fabrication of microStructures using Structural and Sacrificial films …

A micromachined gyroscope has first and second coplanar bodies suspended over a
substrate and movable in their plane relative to the substrate. The first body is dithered along …