RR Amashaev, IM Abdulagatov, MK Rabadanov… - Russian Journal of …, 2021 - Springer
Molecular layer deposition (MLD) of thin polyamide films was performed using 1, 3, 5-
benzenetricarbonyltrichloride (trimesoyl chloride, TMC) and 1, 2-ethylenediamine (EDA) as …