摘要随着精密仪器制造和半导体加工产业的蓬勃发展, 对微小结构表面形貌的观察和测量是现代
科学研究的一个重要方向. 激光扫描共聚焦显微成像技术因高分辨率, 高信噪比和优秀的层切 …

We propose ghost imaging (GI) with deep learning to improve detection speed. GI, which
uses an illumination light with random patterns and a single-pixel detector, is correlation …

The tendency to increase the accuracy and quality of optical parts inspection can be
observed all over the world. The imperfection of manufacturing techniques can cause …

Quality control is essential to ensure the performance and yield of microdevices in industrial
processing and manufacturing. In particular, 3D microscopy can be considered as a …

High-performance optics puts stringent requirements on the defect control of transparent
optical components (TOCs). In order to accurately and reliably detect the surface and …

Multipass amplifier systems in areas such as high-energy-density physics and astrophysics
play an important role, but the undetermined stray light caused by defects seriously …

We explore the contribution of convolutional neural networks to correcting for the effect of the
point spread function (PSF) of the optics when applying ghost imaging (GI) combined with …

The vision-guided robotic machining accuracy highly depends on the hand-eye calibration
accuracy between robot and vision equipment. In order to address the problem of less …

Defect detection requires highly sensitive and robust inspection methods. This study shows
that non-overlapping illumination patterns can improve the noise robustness of deep …

A camera-based dark-field imaging system can effectively detect defects of microns on large
optics by scanning and stitching sub-apertures with a small field of view. However …