This paper reviews various sensor technologies with application in automobiles and robots.
Several automotive sensors have been developed using the micro‐electromechanical …

This paper reports a MEMS-on-LSI integrated tactile sensor for robot applications that has
both fully differential capacitive 3-axis force sensing and signal processing in a single chip …

Covering a whole surface of a robot with tiny sensors which can measure local pressure and
transmit the data through a network is an ideal solution to give an artificial skin to robots to …

This paper reports a microelectromechanical systems (MEMS) tactile sensor with a quad-
seesaw-electrode (QSE) structure, which allows integration with a CMOS substrate. The …

This paper describes a MEMS-CMOS integrated tactile sensor for surface mounting on a
flexible and stretchable bus line. The sensor is featured by the following configurations;(1) A …

Robot tactile sensation can enhance human–robot communication in terms of safety,
reliability and accuracy. The final goal of our project is to widely cover a robot body with a …

Two stacked integration methods have been developed to enable advanced microsystems
of microelectromechanical systems (MEMS) on large scale integration (LSI). One is a wafer …

This paper describes an event-driven tactile sensing system including 100 CMOS-MEMS
integrated 3-axis force sensors of 2.7 mm square footprint for providing robot tactile …

This paper reports a 3-axis MEMS-CMOS integrated tactile sensor for surface-mounting on a
flexible bus line. This 3-axis sensor uses a bran-new CMOS LSI with capacitive sensing …

Electronic skins are critical for many applications in human-machine-environment
interactions. Tactile sensitivity over large areas can be especially applied to prosthetics …