An overview on the vise of microelectromechanical systems (MEMS) technologies for timing
and frequency control is presented. In particular, micromechanical RF filters and reference …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

This work presents a new class of microelectromechanical system (MEMS) resonator toward
60 GHz for the fifth-generation (5G) wireless communications. The wide range of the …

Over the past several decades, the technology of micro-electromechanical system (MEMS)
has advanced. A clear need of miniaturization and integration of electronics components …

6,249,073 B1 6/2001 Nguyen et al. 6,336,366 B1 1/2002 Thundat et al. 6,349,454 B1*
2/2002 Manfra et al................ 29, 25.35 6,437.486 B1 8, 2002 BurcSu et al. 6,767,749 B2 …

This paper reports on the design, fabrication, and characterization of piezoelectrically-
transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk …

Wireless sensor nodes are autonomous devices incorporating sensing, power, computation,
and communication into one system. Applications for large scale networks of these nodes …

This paper reports on the design, fabrication and testing of novel one and two port
piezoelectric higher order contour-mode MEMS resonators that can be employed in RF …

This paper introduces the resonant body transistor (RBT), a silicon-based dielectrically
transduced nanoelectromechanical (NEM) resonator embedding a sense transistor directly …

Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …