Recent developments on the preparation and application of ZnO films for acoustic wave- based microfluidics and biosensors are reviewed in this paper. High quality and strongly …
Sensors based on “resonance phenomenon” span a broad spectrum of important current applications including detection of biological and chemical agents, and measurements of …
Y Zhang, J Luo, AJ Flewitt, Z Cai, X Zhao - Biosensors and Bioelectronics, 2018 - Elsevier
Biosensors play important roles in different applications such as medical diagnostics, environmental monitoring, food safety, and the study of biomolecular interactions. Highly …
Different acoustic wave modes are required for effective implementation of biosensing and liquid actuation functions in an acoustic wave-based lab-on-a-chip. For efficient sensing in …
I Katardjiev, V Yantchev - Vacuum, 2012 - Elsevier
The article reviews recent developments of the thin film electro-acoustic (TEA) technology in view of the design and fabrication of micro-acoustic transducers for biosensor applications …
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer …
Y Zhou, Y Zou, C Gao, Q Xu, X Tong, B Lin… - Applied Physics …, 2022 - pubs.aip.org
The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid sensors because of its high frequency and sensitivity. To investigate the potential of FBAR …
T Yanagitani, N Morisato, S Takayanagi… - IEEE transactions on …, 2011 - ieeexplore.ieee.org
A method for designing frequencies and modes in ultrasonic transducers above the very- high-frequency (VHF) range is required for ultrasonic non-destructive evaluation and …
W Xu, X Zhang, S Choi, J Chae - Journal of …, 2010 - ieeexplore.ieee.org
We report a high-quality-factor (Q) film bulk acoustic resonator (FBAR) operating in liquid environments. By integrating a microfluidic channel to a longitudinal-mode FBAR, a Q of up …