Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Recent developments on the preparation and application of ZnO films for acoustic wave-
based microfluidics and biosensors are reviewed in this paper. High quality and strongly …

Sensors based on “resonance phenomenon” span a broad spectrum of important current
applications including detection of biological and chemical agents, and measurements of …

Biosensors play important roles in different applications such as medical diagnostics,
environmental monitoring, food safety, and the study of biomolecular interactions. Highly …

Different acoustic wave modes are required for effective implementation of biosensing and
liquid actuation functions in an acoustic wave-based lab-on-a-chip. For efficient sensing in …

The article reviews recent developments of the thin film electro-acoustic (TEA) technology in
view of the design and fabrication of micro-acoustic transducers for biosensor applications …

Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design,
fabrication technology and application of a recently developed new type of device, multilayer …

The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid
sensors because of its high frequency and sensitivity. To investigate the potential of FBAR …

A method for designing frequencies and modes in ultrasonic transducers above the very-
high-frequency (VHF) range is required for ultrasonic non-destructive evaluation and …

We report a high-quality-factor (Q) film bulk acoustic resonator (FBAR) operating in liquid
environments. By integrating a microfluidic channel to a longitudinal-mode FBAR, a Q of up …