Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

Precise measurement of variations in the local gravitational acceleration is valuable for
natural hazard forecasting, prospecting, and geophysical studies. Common issues of the …

The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven
by global connectivity needs and is closely linked to emerging digital technologies and the …

This letter presents a high-performance resonant MEMS accelerometer comprising of a
single force-sensitive vibrating beam element sandwiched between two inertial masses. The …

A sensitive micromachined resonant accelerometer that exhibits extremely low noise floor
and excellent bias stability is presented for future application of moving-base gravimetry. An …

This paper reports the developments toward an integrated, tri-axial, frequency-modulated,
consumergrade, and microelectromechanical system (MEMS) gyroscope. A custom low …

The bandwidth-enhanced oversampling successive approximation (BE-OSA) readout
technique is proposed in this article to reduce the noise floor of the readout circuit for micro …

MEMS capacitive accelerometer for the Internet of Things (IoT) applications is designed with
open-loop structure rather than closed-loop structure to achieve low power consumption. In …

MEMS capacitive accelerometer for the Internet of Things (IoT) applications is designed with
open-loop structure rather than close-loop structure to achieve low power consumption. In …