The geometrical constraints and dimensional tolerances lead to specific design issues of MEMS manipulators for biological applications. The target properties become even more …
A novel parallel robot design with spherical flexure joints for use in the short-stroke stage in semi-conductor manufacturing motion systems, ie nanolithography machines, is introduced …
Z Lyu, Q Xu - IECON 2021–47th Annual Conference of the …, 2021 - ieeexplore.ieee.org
High-performance and multi-function micromanipulator is favored by micromanipulation and microassembly systems. In this paper, a piezoelectric-actuated biaxial asymmetrical …