Optomechanical sensing based on the coupling between mechanical motions and optical
resonances has attracted huge interest in sensor applications due to its small footprint, high …

Biomechanical signals, such as strain variations of the skin, vibrations of the chest and
throat, as well as motions of the limbs, hold immense significance in healthcare monitoring …

Accelerometers are among the most mature sensor technologies with a broad range of
applications in multiple fields and industries. They represent the most widely used …

Piezoelectric accelerometers present higher sensitivities and better signal-to-noise ratios in
comparison with piezoresistive and capacitive accelerometers. A micro-electromechanical …

A self-powered triboelectric accelerometer miniaturized to the micro-scale is presented. This
micro triboelectric accelerometer (MTEA) was fabricated using CMOS-compatible …

This paper presents the design, optimization, fabrication, and characterization of a novel
accelerometer consisting of a graphene‐coated liquid metal proof mass integrated with laser …

In this study, a hybrid sol-gel method was used to fabricate Pb (Zr 0.52 Ti 0.48) 0.98 Nb 0.02
O 3 (PNZT) piezoelectric thick films. By preparing Pb (Zr 0.52 Ti 0.48) 0.98 Nb 0· 02 O 3 sol …

Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in
consumer electronics and handheld devices due to their low power consumption as well as …

A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52 (Lead
Zirconate Titanate) disk was investigated for the large displacement requirements of …

In response to the growing demand for high-sensitivity accelerometers in vector
hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four …