Y Zhang, H Yang, H Peng, Y Cao… - IEEE Electron Device …, 2019 - ieeexplore.ieee.org
In this letter, self-aligned top-gate (SATG) amorphous In-Ga-Zn-O (a-IGZO) thin-film
transistors (TFTs) with an 8.62-nm SiO 2 gate dielectric grown by conventional plasma …