A prototype of a Phase Spatial Light Modulator (PLM) device has been developed and
demonstrated using DLP Micro-ElectroMechanical System (MEMS) based technology …

In this paper we present the planarization process of a CMOS chip for the integration of a
microelectromechanical systems (MEMS) metal mirror array. The CMOS chip, which comes …

This paper describes a planarization procedure to achieve a flat CMOS die surface for the
integration of a MEMS metal mirror array. The CMOS die for our device is 4 mm× 4 mm and …

(57) ABSTRACT A microelectromechanical actuator for a light beam steering device is
provided that includes memory cells coupled to at least one electronic circuitry component …

In methods and apparatus for increasing efficiency and optical bandwidth of a
microelectromechanical system pis ton-mode spatial light modulator, an example apparatus …

Two spatial light modulators are utilized for beam splitting, steering and tracking. Both linear
and holographic phase screens are used in a demonstration of technology to allow real time …

This paper presents a micromachined Spatial Light Modulator (uSLM) made by integrating
metal MEMS directly on top of planarized foundry-prefabricated complementary metal-oxide …

A CAD-based seamless design system for MEMS named DS/MEMS was developed which
performs coupled-field analysis, optimal and robust design. DS/MEMS has been developed …

This thesis examines the design and characterisation of a compact optica1 power equalizer
module for optica1 fiber te1ecommunication applications. The various components of the …

This paper describes a novel MEMS integration technique on a CMOS chip. MEMS
integration on CMOS circuit has many advantages in view of manufacturing cost and …