Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of
attention over the last two decades because of their low power consumption, easy …

The present review provides information relevant to issues and challenges in MEMS testing
techniques that are implemented to analyze the microelectromechanical systems (MEMS) …

This paper reports the developments toward an integrated, tri-axial, frequency-modulated,
consumergrade, and microelectromechanical system (MEMS) gyroscope. A custom low …

Mismatching quality factors (Q-factors) is one of the main factors causing zero-rate output
(ZRO) in degenerate (DE) Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes …

This paper investigates temperature compensation methods used for the scale factor and
bias of the MEMS gyroscope within the temperature range from− 40° C to 60° C. The …

The microelectromechanical system (MEMS) is one of the most diversified fields of
microelectronics; it is rated to be the most promising technology of modern engineering …

With advances in fabrication technologies lowering cost, MEMS gyroscopes are being used
in an ever wider variety of applications, including those requiring operation at/or beyond the …

This paper shows temperature and acceleration effects on Micro-Electro-Mechanical-
Systems (MEMS) gyroscope and a practical solution is presented to mitigate effect of these …

With the rapid microelectromechanical systems (MEMS) market growth, MEMS reliability has
become ever more important especially in medical, automotive, and aerospace applications …

Micro-Electro-Mechanical Systems, or MEMS, are integrated devices containing electronic
and mechanical components. MEMS devices form the core of many sensors including …