[HTML][HTML] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques

RMR Pinto, V Gund, C Calaza, KK Nagaraja… - Microelectronic …, 2022 - Elsevier
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …

[PDF][PDF] Recent progress in metal-organic chemical vapor deposition of N-polar group-III nitrides

S Keller, H Li, M Laurent, Y Hu, N Pfaff… - Semiconductor …, 2014 - researchgate.net
Progress in metal-organic chemical vapor deposition of high quality () 0001 N-polar (Al, Ga,
In) N films on sapphire, silicon carbide and silicon substrates is reviewed with focus on key …

[HTML][HTML] Recent advances in fabricating wurtzite AlN film on (0001)-plane sapphire substrate

H Wu, K Zhang, C He, L He, Q Wang, W Zhao, Z Chen - Crystals, 2021 - mdpi.com
Ultrawide bandgap (UWBG) semiconductor materials, with bandgaps far wider than the 3.4
eV of GaN, have attracted great attention recently. As a typical representative, wurtzite …

KOH based selective wet chemical etching of AlN, AlxGa1− xN, and GaN crystals: A way towards substrate removal in deep ultraviolet-light emitting diode

W Guo, R Kirste, I Bryan, Z Bryan, L Hussey… - Applied Physics …, 2015 - pubs.aip.org
A controllable and smooth potassium hydroxide-based wet etching technique was
developed for the AlGaN system. High selectivity between AlN and AlxGa1ÀxN (up to 12Â) …

[HTML][HTML] The effect of polarity and surface states on the Fermi level at III-nitride surfaces

P Reddy, I Bryan, Z Bryan, W Guo, L Hussey… - Journal of Applied …, 2014 - pubs.aip.org
Surface states and their influence on the Fermi level at the surface of GaN and AlN are
studied using x-ray photoelectron spectroscopy (XPS). The effect of polarity on surface …

Lateral‐polarity structure of AlGaN quantum wells: a promising approach to enhancing the ultraviolet luminescence

W Guo, H Sun, B Torre, J Li, M Sheikhi… - Advanced Functional …, 2018 - Wiley Online Library
Aluminum‐gallium‐nitride alloys (Al x Ga1–x N, 0≤ x≤ 1) can emit light covering the
ultraviolet spectrum from 210 to 360 nm. However, these emitters have not fulfilled their full …

Electronic biosensors based on III-nitride semiconductors

R Kirste, N Rohrbaugh, I Bryan, Z Bryan… - Annual Review of …, 2015 - annualreviews.org
We review recent advances of AlGaN/GaN high-electron-mobility transistor (HEMT)-based
electronic biosensors. We discuss properties and fabrication of III-nitride-based biosensors …

Molecular beam homoepitaxy of N-polar AlN: Enabling role of aluminum-assisted surface cleaning

Z Zhang, Y Hayashi, T Tohei, A Sakai, V Protasenko… - Science …, 2022 - science.org
N-polar aluminum nitride (AlN) is an important building block for next-generation high-power
radio frequency electronics. We report successful homoepitaxial growth of N-polar AlN by …

Aluminum nitride thin film based reconfigurable integrated photonic devices

Z Luo, A Zhang, W Huang, S Shao… - IEEE Journal of …, 2023 - ieeexplore.ieee.org
In the past few decades, silicon photonics with complementary metal-oxide-semiconductor
(CMOS) process compatibility has been well developed and successfully applied to …

Self-powered ultraviolet MSM photodetectors with high responsivity enabled by a lateral n+/n homojunction from opposite polarity domains

C Guo, W Guo, Y Dai, H Xu, L Chen, D Wang, X Peng… - Optics Letters, 2021 - opg.optica.org
We report a GaN-based self-powered metal–semiconductor–metal (MSM)-type ultraviolet
(UV) photodetector (PD) by employing a “lateral polarity structure (LPS)” grown on the …