Aspects of tactile probing on the micro scale

EJC Bos - Precision Engineering, 2011 - Elsevier
This paper discusses the aspects that influence the interaction between a probe tip and a
work piece during tactile probing in a coordinate measuring machine (CMM). Measurement …

Measurement techniques for three-dimensional metrology of high aspect ratio internal features—a review

T Hovell, J Petzing, W Guo, C Gill, L Justham, N Lohse… - Metrology, 2023 - mdpi.com
Non-destructive measurements of high aspect ratio microscale features, especially those
with internal geometries such as micro-holes, remain a challenging metrology problem that …

Slender tactile sensor for contour and roughness measurements within deep and narrow holes

E Peiner, M Balke, L Doering - IEEE Sensors Journal, 2008 - ieeexplore.ieee.org
A tactile cantilever sensor is described which was designed for quality assurance of high-
aspect ratio microcomponents, eg, spray holes of diesel injector nozzles. It was constructed …

A 'fitness-wheel-shaped'MEMS vector hydrophone for 3D spatial acoustic orientation

R Wang, Y Liu, W Xu, B Bai, G Zhang… - Journal of …, 2017 - iopscience.iop.org
For the purpose of acquiring precise underwater 3D spatial orientation, a'fitness-wheel-
shaped'MEMS vector hydrophone (FWVH) is developed, which achieves monitoring of a tri …

Integration of an isotropic microprobe and a microenvironment into a conventional CMM

D Metz, S Jantzen, D Wessel, G Mies… - Measurement …, 2019 - iopscience.iop.org
This paper describes the experimental verification of the novel IMT-PTB microprobe
combined with a uniquely designed microenvironment. The microprobe consists of three …

Deterioration of bone quality in the tibia and fibula in growing mice during skeletal unloading: gender-related differences

CY Ko, D Hyun Seo, H Sung Kim - 2011 - asmedigitalcollection.asme.org
Skeletal unloading causes bone loss in both men and women; however, only a few studies
have been performed on the effects of gender differences on bone quality during skeletal …

3-D isotropic tactile microprobe based on a silicon parallelogram kinematic: From concept to fabrication

D Metz, A Dietzel - Journal of Microelectromechanical Systems, 2018 - ieeexplore.ieee.org
This paper reports on a unique tactile microprobe based on a parallelogram kinematic made
from monocrystalline silicon. This kinematic, made out of an orthogonal cascade assembly …

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

E Peiner, L Doering, M Balke, A Christ - Microsystem technologies, 2008 - Springer
A piezoresistive silicon cantilever-type tactile sensor was described as well as its application
for dimensional metrology with high-aspect-ratio micro components and as a transferable …

Nano position sensing based on laser trapping technique for flat surfaces

M Michihata, Y Takaya, T Hayashi - Measurement Science and …, 2008 - iopscience.iop.org
The main purpose of this study is to develop a nano-CMM (coordinate measuring machine)
that can measure three-dimensional shapes of a micro component. An improved probe is …

[PDF][PDF] Determining measurement uncertainties of feature measurements on CMMs

N Van Gestel, JP Kruth, P Bleys - PhD, KU Leuven, 2011 - academia.edu
De afmetingen van technische producten zijn vaak van enorm groot belang om hun correcte
werking te garanderen. Maattoleranties geven aan hoe sterk de werkelijke afmetingen …