Reactive Ion Etching of X-Cut LiNbO3 in an ICP/TCP System for the Fabrication of an Optical Ridge Waveguide
A Kozlov, D Moskalev, U Salgaeva, A Bulatova… - Applied Sciences, 2023 - mdpi.com
In this study, the technology for producing ridge waveguides with a minimal roughness of the
sidewalls and material surface in a near-waveguide region was developed with the purpose …
sidewalls and material surface in a near-waveguide region was developed with the purpose …
Lithium niobate for M/NEMS resonators
S Gong - Piezoelectric MEMS Resonators, 2017 - Springer
Piezoelectric Radio frequency (RF) microelectromechanical systems (MEMS) resonators are
chip-scale components embedded in the modern RF front ends to carry out the function of …
chip-scale components embedded in the modern RF front ends to carry out the function of …