Spectroscopic ellipsometry study of parylene AF4

D Solonenko, M Petschnigg, TD Dao… - … Spring Seminar on …, 2022 - ieeexplore.ieee.org
The spectroscopic ellipsometry study of parylene AF4 films was performed in a broad optical
range from mid-infrared (MIR) to deep ultra-violet (DUV) light. The wavelength-dependent …