Shape memory alloy (SMA) actuators can provide significant advantages for small-scale
robotics given their robustness, energy density, and low voltage actuation. However, NiTi …

This chapter describes a wide range of technologies for contact-based
microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) switches …

Microparticle manipulation has been widely used in clinical diagnosis, cell separation, and
biochemical analysis via optics, electronics, magnetics, or acoustic wave driving. Among …

This paper presents the design and fabrication of a 500 μm× 200 μm× 0.070 μm micro-
cantilever as ultrasonic frequency generator. Actuation energy (up to 4.1 V dc) after fixed …

We report on a DC/DC step-down switching regulator using a microelectromechanical
systems (MEMS) switch for the first time. The output voltage developed in a storage …

Since a microelectromechanical (MEM) switch with an electrostatically actuated cantilever
was first demonstrated by Petersen in 1978 [1], MEM switches have actively been …

In this paper, we present a new design of electrostatically actuated nonlinear impact
resonator with a capacitive seesaw structure to solve the problem of short circuit, stiction and …

Modeling is a pivotal part of any modern design process. The ability to accurately predict
designs before building cuts down on development costs leading to faster development …

The effect of long-term visible-light irradiation on the photo-induced deformation of
amorphous carbon nitride (a-CN x) films was investigated. a-CN x films were deposited on …

Light-driven actuators, which can convert light energy into mechanical energy, are a key
component of photonic switches, pumps, robotics, and sensors. Recent studies of …