Electronics industry is one of the fastest evolving, innovative, and most competitive
industries. In order to meet the high consumption demands on electronics components …

Due to the increasing size of integrated circuits (ICs), their design and optimization phases
(ie, computer-aided design, CAD) grow increasingly complex. At design time, a large design …

With the high demand and sub-nanometer design for integrated circuits, surface defect
complexity and frequency for semiconductor wafers have increased; subsequently …

Due to the high complexity and dynamics of the semiconductor manufacturing process,
various process abnormality could result in wafer map defects in many work stations. Thus …

Wafer map analysis provides critical information for quality control and yield improvement
tasks in semiconductor manufacturing. In particular, wafer patterns of gross failing areas …

With the continuous drive toward integrated circuits scaling, efficient yield analysis is
becoming more crucial yet more challenging. In this paper, we propose a novel …

The semiconductors are used as various precision components in many electronic products.
Each layer must be inspected of defect after drawing and baking the mask pattern in wafer …

The objective of this paper is to propose a systematic failure pattern recognition for wafer
map based on neural networks. A deep convolutional neural network (DCNN) model which …

Due to advances in semiconductor processing technologies, wafer failure pattern detection
plays a key role in preventing yield loss excursion events for semiconductor manufacturing …

Wafer map defect pattern classification using convolutional neural network (CNN) has
gained a lot of attention in recent years but it demands huge computation and memory cost …