Sputtering of compound semiconductor surfaces. II. Compositional changes and radiation-induced topography and damage

JB Malherbe - Critical Reviews in Solid State and Material …, 1994 - Taylor & Francis
Ion bombardment often leads to compositional changes in the surface layers of
multicomponent targets. Such changes due to noble gas ion sputtering are discussed for InP …

The growth and properties of Al and AlN films on GaN (0001)–(1× 1)

VM Bermudez, TM Jung, K Doverspike… - Journal of Applied …, 1996 - pubs.aip.org
The growth, structure, and annealing behavior of Al films, formed by in situ vapor deposition
on GaN0001–11 near 25 C, have been studied using Auger, electron energy loss, x ray and …

Growth of thin Ni films on GaN (0001)-(1× 1)

VM Bermudez, R Kaplan, MA Khan, JN Kuznia - Physical Review B, 1993 - APS
The growth and structure of Ni films, formed by in situ deposition on atomically clean GaN
(0001)-(1× 1) surfaces, have been studied using Auger, electron-energy-loss, and ultraviolet …

Chemistry and kinetics of the GaN formation by plasma nitridation of GaAs: An in situ real-time ellipsometric study

M Losurdo, P Capezzuto, G Bruno, EA Irene - Physical Review B, 1998 - APS
The chemistry and kinetics of the nitridation of GaAs (100) surfaces by N 2, N 2− H 2, and N
2− NH 3 radio-frequency plasmas, in a remote configuration, are investigated in situ and in …

Composition and structure of the GaN {0001}-(1× 1) surface

MM Sung, J Ahn, V Bykov, JW Rabalais, DD Koleske… - Physical Review B, 1996 - APS
The composition and structure of the n-type GaN {0001}-(1× 1) surface of samples grown on
sapphire by organometallic vapor-phase epitaxy (OMVPE) has been determined through the …

Surface passivation of GaAs by ultra-thin cubic GaN layer

S Anantathanasarn, S Ootomo, T Hashizume… - Applied surface …, 2000 - Elsevier
Attempts were made to passivate the GaAs (001) surface by a pseudomorphic ultra-thin
cubic GaN layer formed by a nitrogen radical (N-radical) or nitrogen plasma irradiation …

Passivation of GaAs (001) surface by the growth of high quality c-GaN ultra-thin film using low power glow discharge nitrogen plasma source

G Monier, L Bideux, C Robert-Goumet, B Gruzza… - Surface science, 2012 - Elsevier
The benefits of using a low power glow discharge nitrogen plasma source to create high
quality GaN layers on GaAs (001) surface are first highlighted. This uncommon type of …

XPS investigation of ion beam induced conversion of GaAs (0 0 1) surface into GaN overlayer

P Kumar, M Kumar, BR Mehta, SM Shivaprasad - Applied surface science, 2009 - Elsevier
For the advance of GaN based optoelectronic devices, one of the major barriers has been
the high defect density in GaN thin films, due to lattice parameter and thermal expansion …

Study of the mechanisms of GaN film growth on GaAs surfaces by thermal and plasma nitridation

M Losurdo, P Capezzuto, G Bruno… - Journal of Vacuum …, 1998 - pubs.aip.org
The kinetics of GaAs nitridation using N 2 plasmas, both radio frequency and electron
cyclotron resonance sources, is investigated using in situ and real time ellipsometry. A …

NEXAFS and XPS study of GaN formation on ion-bombarded GaAs surfaces

Z Majlinger, A Bozanic, M Petravic, KJ Kim, B Kim… - Vacuum, 2009 - Elsevier
Interaction of low-energy nitrogen ions (0.3–2keV N2+) with GaAs (100) surfaces has been
studied by X-ray photoemission spectroscopy (XPS) around N 1s and Ga 3d core-levels and …