Advances in capacitive micromachined ultrasonic transducers

K Brenner, AS Ergun, K Firouzi, MF Rasmussen… - Micromachines, 2019 - mdpi.com
Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid
development in the last decade. Advancements both in fabrication and integration, coupled …

A microwave-induced thermoacoustic imaging system with non-contact ultrasound detection

A Singhvi, KC Boyle, M Fallahpour… - IEEE transactions on …, 2019 - ieeexplore.ieee.org
Portable and easy-to-use imaging systems are in high demand for medical, security
screening, nondestructive testing, and sensing applications. We present a new microwave …

Dual-backplate CMUTs with wide bandwidth and low driving voltage for airborne applications

S Anzinger, C Bretthauer, HS Wasisto… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
In this work, novel airborne capacitive micromachined ultrasonic transducers (CMUTs)
based on a dual-backplate (DBP) technology are presented. In contrast to conventional …

Wide bandwidth and low driving voltage vented CMUTs for airborne applications

B Ma, K Firouzi, K Brenner… - IEEE transactions on …, 2019 - ieeexplore.ieee.org
This paper presents a novel method to increase the bandwidth (BW) of airborne capacitive
micromachined ultrasonic transducers (CMUTs). This method introduces a gaseous …

Coupling effects of crosstalk and parasitic loss on capacitive micromachined ultrasonic transducers

Y Zhao, Z Li, J Li, L Zhao, Z Liu, D Lu, Z Li… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
Capacitive micromachined ultrasonic transducers (CMUTs) have been widely utilized in
applications of biomolecule monitoring, ultrasound medical diagnosis, and ultrasound …

Acoustic transmission line based modelling of microscaled channels and enclosures

S Anzinger, J Manz, C Bretthauer… - The Journal of the …, 2019 - pubs.aip.org
An analytical model is presented that describes the acoustical impedance of cylindrical
tubes and concentrically connected systems of such tubes valid up to the ultrasonic …

Multilayer masking technology for fabricating airborne CMUTs with multi-depth fluidic trenches

B Ma, K Firouzi, BT Khuri-Yakub - Journal of …, 2022 - ieeexplore.ieee.org
This paper presents a novel multilayer masking technology for fabricating airborne
capacitive micromachined ultrasonic transducers (CMUTs) with multi-depth fluidic trenches …

PMMA-based wafer-bonded Capacitive Micromachined Ultrasonic Transducer for underwater applications

M Ahmad, A Bozkurt, O Farhanieh - Micromachines, 2019 - mdpi.com
This article presents a new wafer-bonding fabrication technique for Capacitive
Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA) …

Fractional bandwidth improvement of ultrasonic airborne transducers using acoustic block

BH Park, BK Kim, KK Park - Journal of Mechanical Science and …, 2021 - Springer
In this paper, we propose an acoustic block for widening the bandwidth and modulating
center frequency of airborne transducers to improve the ultrasound imaging or metrology …

[图书][B] Airborne Capacitive Micromachined Ultrasonic Transducers in Dual-Backplate Technology

S Anzinger - 2022 - researchgate.net
Electronic microsystems define the interface between humans and modern mobile devices
by their versatility of applications and high degree of miniaturization. The process of sending …