This article discusses the potential of 4H-silicon carbide (SiC) as a superior acoustic
material for microelectromechanical systems (MEMS), particularly for high-performance …

In this paper, Thickness-Lamé (TL) mode piezoelectrically-transduced silicon resonators are
studied and demonstrated. It will be shown that unlike Planar-Lamé resonance modes …

This paper presents an exhaustive analysis on Zinc Oxide based modified Lame'mode
resonators. Extensive analytical study describing the operating principles of the resonator is …

This study presents a micro-electromechanical system (MEMS) oscillator built using a Lamb
wave resonator fabricated on X-cut Lithium Tantalate (LT). Leveraging the unique …

The focus of this work is to design and implement resonators for ultra-stable high-frequency
(> 100MHz) silicon-based MEMS oscillators. Specifically, two novel types of resonators are …

Microcontroller Compensated Micromachined Oscillator Circuit Page 1 Microcontroller
Compensated Micromachined Oscillator Circuit Senior Design II Project Document …

Thickness harmonics in Cross-Sectional Quasi Lamé Mode (CQLM) thin-film piezoelectric-
on-silicon (TPoS) resonators are demonstrated for the first time. Harmonic CQLM TPoS …

This project focuses on designing a temperature control circuit for a thin-film piezoelectric on
silicon microelectromechanical systems (MEMS) oscillator. MEMS oscillators have an …

The objective and motivation for this project is to design a low-power, low-noise oven-control
circuit to optimize the stability of a MEMS oscillator. MEMS oscillators can be fabricated …