Reflective spatial light modulator having dual layer electrodes and method of fabricating same
K Huang - US Patent 7,477,440, 2009 - Google Patents
(57) ABSTRACT A reflective spatial light modulator device features two pairs of electrodes
formed on different metallization layers. Eleva tion of the upper electrode pair reduces its …
formed on different metallization layers. Eleva tion of the upper electrode pair reduces its …
Reflective spatial light modulator having dual layer electrodes and method of fabricating same
K Huang - US Patent 7,911,678, 2011 - Google Patents
US PATENT DOCUMENTS device designs to eliminate such breakdown. In another
embodiment, the reduced distance between the electrode and the reflecting surface allows …
embodiment, the reduced distance between the electrode and the reflecting surface allows …