Progress in semiconductor diamond photodetectors and MEMS sensors

M Liao - Functional Diamond, 2022 - Taylor & Francis
Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily
superior to those of the currently available wide-bandgap semiconductors for deep …

Emerging low-dimensional materials for nanoelectromechanical systems resonators

S Ban, X Nie, Z Lei, J Yi, A Vinu, Y Bao… - Materials Research …, 2023 - Taylor & Francis
Low-dimensional materials (LDMs), due to exotic mechanical, optical and electrical
properties enhanced by ultrahigh surface-to-volume ratio and quantum confinements, have …

On‐chip diamond MEMS magnetic sensing through multifunctionalized magnetostrictive thin film

Z Zhang, W Zhao, G Chen, M Toda… - Advanced Functional …, 2023 - Wiley Online Library
Electrically integrable, high‐sensitivity, and high‐reliability magnetic sensors are not yet
realized at high temperatures (500° C). In this study, an integrated on‐chip single‐crystal …

Comprehensive study of magnetostriction-based MEMS magnetic sensor of a FeGa/PZT cantilever

MA Indianto, M Toda, T Ono - Sensors and Actuators A: Physical, 2021 - Elsevier
This research comprehensively studies a magnetostriction-based cantilever resonator
magnetic sensor of Iron Gallium (FeGa) coupled to a piezoelectric material of lead zirconate …

Effect of defects on Q factors of single-crystal diamond MEMS resonators

Z Zhang, G Chen, K Gu, S Koizumi, M Liao - Functional Diamond, 2023 - Taylor & Francis
A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD)
microelectromechanical system (MEMS) for high-performance sensors. In this report, we …

A one-step fabrication method of flexible magnetostrictive fiber ribbon based on Fe50Co50 alloy and its characteristics study

H Liu, L Zhao, W Wang, T Ren, Y Chang, X Yu… - Sensors and Actuators A …, 2024 - Elsevier
Magnetostrictive materials are widely used in sensors, actuators and micro-nano electronics
because of their excellent performance. However, traditional rigid magnetostrictive materials …

Diamond MEMS: From classical to quantum

H Sun, Z Zhang, Y Liu, G Chen, T Li… - Advanced Quantum …, 2023 - Wiley Online Library
Diamond has numerous outstanding properties in mechanics, physics, chemistry,
electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical …

A magnetostrictive BaTiO3-Fe-Ga & PDMS magnetic field sensor: Research on magnetic detection performance

M Xu, Q Zhang, Q Tan, W Zhang, S Sang… - Sensors and Actuators A …, 2022 - Elsevier
Pizoelectric flexible magnetic field sensors have recently attracted much attention due to
their high sensitivity and fast response time. A clear sensing mechanism will effectively …

Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

Z Zhang, L Sang, J Huang, W Chen, L Wang… - Carbon, 2020 - Elsevier
The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS)
through with a functional hetero-material provides the strategy to develop diamond MEMS …

Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers

Z Zhang, L Sang, J Huang, L Wang, Y Koide, S Koizumi… - Carbon, 2022 - Elsevier
The authors report the enhancement of the magnetic sensitivity of single-crystal diamond
(SCD) MEMS magnetic sensor, which is composed of a SCD cantilever integrated with a …