Related US Application Data“Light Over Matters,” Jun. 1993, Circle No. 36. Akasaka,“Three-
Dimensional IC Trends,” Proceedings of (60) Division of application No. 08/769.947, filed on …

Surface which is caused to exhibit a predetermined imped ance characteristic to particular
frequencies of light. The amplitude of light delivered by each of the modulation elements is …

3.439, 973 4/1969 Paul et al......... 350/147 elements is controlled independently by pulse
code modu 3,443,854 5/1969 Weiss...... 350/147 lation. Each modulation element has a …

Microfabrication processes for chemical and biochemical sensors are reviewed. Standard
processing steps originating from semiconductor technology are detailed, and specific …

(60) Division of application No. 09/991.378, filed on Nov. 21. 2001, which is a continuation of
application No. 08/769.947, filed on Dec. 19, 1996, now abandoned, which is a continu ation …

(60) Division of application No. 09/413,222, filed on Oct. 5,() 1999, now abandoned, which is
a continuation-in-part of Primary Examiner Hung Xuan Dang application No. 08/744.253 …

4,099,854 4,196,396 4.228, 437 4,377,324 4.389, 096 4,392,711 4,403.248 4,441,791
4,445,050 4.459, 182 4,482,213 4,500,171 4,519,676 4,531,126 4,566,935 4,571,603 …

Microspectrometers fabricated in silicon using microelectromechanical systems
technologies are versatile microinstruments: small, lightweight, and featuring a …

In one embodiment the invention provides an interferomet ric modulator comprising a cavity
defined by two walls held by a Support. The Support comprises two materials. Such that the …

Miniaturized free-field based optical microspectrometers have huge potential for application
in industry, science, medicine, agriculture and biology. State-of-the-art is the micro-assembly …