[HTML][HTML] A review of high-performance MEMS sensors for resource exploration and geophysical applications

HF Liu, ZC Luo, ZK Hu, SQ Yang, LC Tu, ZB Zhou… - Petroleum Science, 2022 - Elsevier
MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

Dense and long-term monitoring of earth surface processes with passive RFID—a review

M Le Breton, F Liébault, L Baillet, A Charléty… - Earth-science …, 2022 - Elsevier
Abstract Billions of Radio-Frequency Identification (RFID) passive tags are produced yearly
to identify goods remotely. New research and business applications are continuously …

Micro 3D printing of a functional MEMS accelerometer

S Pagliano, DE Marschner, D Maillard… - Microsystems & …, 2022 - nature.com
Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used
across industries, including the automotive, consumer electronics, and medical industries …

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

X Gong, YC Kuo, G Zhou, WJ Wu… - Microsystems & …, 2023 - nature.com
Potentially applied in low-noise applications such as structural health monitoring (SHM), a 1-
axis piezoelectric MEMS accelerometer based on aerosol deposition is designed …

Acceleration sensors: Sensing mechanisms, emerging fabrication strategies, materials, and applications

W Babatain, S Bhattacharjee, AM Hussain… - ACS Applied …, 2021 - ACS Publications
Accelerometers are among the most mature sensor technologies with a broad range of
applications in multiple fields and industries. They represent the most widely used …

Sensing techniques and interrogation methods in optical MEMS accelerometers: A review

B Malayappan, UP Lakshmi, BP Rao… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
In this article, we review optical MEMS accelerometers with a particular focus on sensing
techniques and interrogation methods. Optical accelerometers find use in various …

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√ Hz noise floor

H Zhang, M Pandit, G Sobreviela, M Parajuli… - Microsystems & …, 2022 - nature.com
Mode-localized sensors have attracted attention because of their high parametric sensitivity
and first-order common-mode rejection to temperature drift. The high-fidelity detection of …

Sensing devices for detecting and processing acoustic signals in healthcare

N Mallegni, G Molinari, C Ricci, A Lazzeri, D La Rosa… - Biosensors, 2022 - mdpi.com
Acoustic signals are important markers to monitor physiological and pathological conditions,
eg, heart and respiratory sounds. The employment of traditional devices, such as …

Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements

NF Morozov, DA Indeitsev, VS Igumnova… - International Journal of …, 2022 - Elsevier
In the presented work, a model of a microelectromechanical accelerometer with two
microbeam sensing elements located between two fixed electrodes is proposed. The action …

Design and modeling of fiber-free optical MEMS accelerometer enabling 3D measurements

S Abozyd, A Toraya, N Gaber - Micromachines, 2022 - mdpi.com
Optical accelerometers are popular in some applications because of their better immunity to
electromagnetic interference, and they are often more sensitive than other accelerometer …