The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …

We present high-performance integrated optical phased arrays along with first-of-their-kind
light detection and ranging (LiDAR) and free-space data communication demonstrators …

Silicon photonics is widely acknowledged as a game-changing technology, driven by the
needs of datacom and telecom. Silicon photonics builds on highly capital-intensive …

Silicon photonics has been heralded for a number of high technology fields, but access to a
high quality technology has been limited to vertically integrated design/fabrication …

This paper reports on large field-of-regard, high-efficiency, and large aperture active optical
phased arrays (OPAs) for optical beam steering in LIDAR systems. The fabricated 5 mm …

We present passive, visible light silicon nitride waveguides fabricated on≈ 100 µm thick 200
mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses of …

Offering open-access silicon photonics-based technologies has played a pivotal role in
unleashing this technology from research laboratories to industry. Fabless enterprises rely …

With the increasing demand for capacity in communications networks, the use of integrated
photonics to transmit, process and manipulate digital and analog signals has been …

Photonic integrated circuits have seen a dramatic increase in complexity over the past
decades. This development has been spurred by recent applications in datacenter …

We describe and characterize a multi-micron silicon photonics platform that was designed to
combine performance, power efficiency, manufacturability, and versatility for integrated …