Exploiting the huge amount of data collected by industries is definitely one of the main
challenges of the so-called Big Data era. In this sense, Machine Learning has gained …

Semiconductor manufacturing is one of the most technologically advanced industrial
sectors. Process quality and control are critical for decreasing costs and increasing yield …

Abstract Industry 4.0 encapsulates methods, technologies, and procedures that transform
data into informed decisions and added value in an industrial context. In this regard …

The rise of industry 4.0 and data-intensive manufacturing makes advanced process control
(APC) applications more relevant than ever for process/production optimization, related …

This paper proposes a fused lasso model to identify significant features in the spectroscopic
signals obtained from a semiconductor manufacturing process, and to construct a reliable …

Virtual metrology (VM) is the estimation of metrology variables that may be expensive or
difficult to measure using readily available process information. This paper investigates the …

Principal Component Analysis (PCA) is a powerful and widely used tool for dimensionality
reduction. However, the principal components generated are linear combinations of all the …

Process monitoring and Predictive Maintenance (PdM) are gaining increasing attention in
most manufacturing environments as a means of reducing maintenance related costs and …

Semiconductor wafer etching is, to a large extent, an open-loop process with little direct
feedback control. Most silicon chip manufacturers rely on the rigorous adherence to a …

A phenomenological-based virtual metrology (VM) technique is developed for predicting the
silicon nitride film thickness in multi-layer plasma-enhanced chemical vapor deposition …